A diamond lathe machine (designed for contact lens industry) allows to prepare samples with sub-nanometer resolution.
Coupling to high refractive WGM is challenging. Semisphere coupler from the same material (Si) is a solution.
Proof of the feasibility: Q=3x106 and coupling >10% is demonstrated on Si ball cavity (Q>1x108 for CaF2 disk cavity made by the lathe machine).