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Titanium nitride magnetron sputtering презентация
Содержание
- 1. Titanium nitride magnetron sputtering
- 2. Preparation Beam tube cleaned according to UHV
- 3. Coating System 3
- 4. Coating System Overview of system with
- 5. Titanium Cathode Assembly
- 6. The Coating Process Balance temperature, pressure, flow
- 7. System Disassembly Nitrogen insertion tube attached to
- 8. Coating Complete Coating analysis coupons were inserted
- 9. Installed in Main Injector One coated tube
- 10. Current Status Main Injector startup September 10,
Preparation Beam tube cleaned according to UHV practices. Vacuum fired at 450 C. Assembled into coating system. Two Fermilab 6” OD tubes in process.
Слайд 1TITANIUM NITRIDE MAGNETRON SPUTTERING
Performed at Brookhaven National Lab
for Fermilab Main Injector
Electron Cloud Studies
June 2009
Linda Valerio
September 11, 2009
Слайд 2Preparation
Beam tube cleaned according to UHV practices.
Vacuum fired at 450 C.
Assembled
into
coating system.
coating system.
Two Fermilab 6” OD tubes in process.
Слайд 4Coating System
Overview of system with
two Fermilab tubes.
Gas introduction flange.
Power and
cooling connections.
Слайд 6The Coating Process
Balance temperature, pressure, flow rate, and voltage to control
deposition.
Start with Argon only for pure Ti layer, then add Nitrogen.
Monitor voltage discharge characteristics, plasma color, and partial pressures on RGA to confirm process.
The Fermilab setup started at 200 C and 4 e-7 Torr and took less than an hour.
Balance tempe
Vacuum fired at 450 C.
Assembled into
coating system.
Start with Argon only for pure Ti layer, then add Nitrogen.
Monitor voltage discharge characteristics, plasma color, and partial pressures on RGA to confirm process.
The Fermilab setup started at 200 C and 4 e-7 Torr and took less than an hour.
Balance tempe
Vacuum fired at 450 C.
Assembled into
coating system.
Argon plasma
Argon + Nitrogen plasma
Слайд 7System Disassembly
Nitrogen insertion tube attached to titanium cathode still inside chamber.
Titanium
cathode with nitrogen distribution tube. Magnet string position indicated by discoloration.
Слайд 8Coating Complete
Coating analysis coupons were inserted
adjacent to production tubes.
Finished Fermilab
tube.
Слайд 9Installed in Main Injector
One coated tube installed during Summer 2009 shutdown
at MI-521.
One uncoated tube also installed, with electron cloud detectors on both.
One uncoated tube also installed, with electron cloud detectors on both.
Слайд 10Current Status
Main Injector startup September 10, 2009 – first opportunity to
start electron cloud studies with coated tube.
Brookhaven will also coat a Main Injector elliptical tube.
Fermilab has a separate collaboration with SLAC to coat a Main Injector elliptical tube using electrostatic sputtering (no magnets).
Eventually, comparison of both methods will be done to determine which is better suited for Main Injector.
Brookhaven will also coat a Main Injector elliptical tube.
Fermilab has a separate collaboration with SLAC to coat a Main Injector elliptical tube using electrostatic sputtering (no magnets).
Eventually, comparison of both methods will be done to determine which is better suited for Main Injector.
